Advanced Metrology Systems - Next-Gen Metrology for IC Manufacturing





WaferSight 2+ wafer geometry & nanotopography Front and backside nanotopography Localized defect detection and height metrology Planarity for litho and CMP applications	Aleris 8510 film thickness & composition Improved 150nm spectroscopic ellipsometer technology Enhanced film metrology for high-k metal gate layers Superior stability and tool matching performance	Therma-Probe 680 implant/anneal stability & uniformity Supports full range of implant and anneal applications Improved short- and long-term dose detectability High-resolution micro-uniformity map
>> Learn More	>> Learn More	>> Learn More